Patent Assignment
Reel/Frame 041800/0840
Assignment of Assignor's Interest
Recorded: 2017-03-30
Pages: 6
Assignors
MURAKAMI, HIROKI
Executed: 2017-03-17
SUZUKI, DAISUKE
Executed: 2017-03-17
MIYAHARA, TAKAHIRO
Executed: 2017-03-17
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Nitride Film Forming Method and Storage Medium