Patent Assignment
Reel/Frame 041801/0048
Assignment of Assignor's Interest
Recorded: 2017-03-30
Pages: 6
Assignee
HITACHI KOKUSAI ELECTRIC INC.
15-12, NISHI-SHIMBASHI 2-CHOME, MINATO-KU, TOKYO, 105-8039, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.