Patent Assignment
Reel/Frame 041804/0321
Assignment of Assignor's Interest
Recorded: 2017-03-31
Pages: 7
Assignors
SUZUKI, KENJI
Executed: 2017-03-13
HOTTA, TAKANOBU
Executed: 2017-03-22
MARUYAMA, TOMOHISA
Executed: 2017-03-22
NASU, MASAYUKI
Executed: 2017-03-22
MIYAHARA, JUNYA
Executed: 2017-03-22
MAEKAWA, KOJI
Executed: 2017-03-22
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Tungsten Film Forming Method and Storage Medium