Tungsten film forming method and storage medium
There is provided a tungsten film forming method for forming a tungsten film on a target substrate disposed inside a chamber kept under a depressurized atmosphere and having a base film formed on a surface thereof, using a tungsten chloride gas as a tungsten raw material gas and a reducing gas for reducing the tungsten chloride gas, which includes: performing an SiH 4 gas treatment with respect to the target substrate having the base film formed thereon by supplying an SiH 4 gas into the chamber; and subsequently, forming the tungsten film by sequentially supplying the tungsten chloride gas and the reducing gas into the chamber while purging an interior of the chamber in the course of sequentially supplying the tungsten chloride gas and the reducing gas.
1. A tungsten film forming method for forming a tungsten film on a target substrate disposed inside a chamber kept under a depressurized atmosphere and having a base film formed on a surface thereof, using a tungsten chloride gas as a tungsten raw material gas and a reducing gas for reducing the tungsten chloride gas, the method comprising:
prior to supplying the tungsten chloride gas into the chamber, performing an SiH 4 gas treatment with respect to the target substrate having the base film formed thereon by supplying only an SiH 4 gas and an N 2 gas into the chamber for a predetermined time;
after the lapse of the predetermined time, terminating the SiH 4 gas treatment and then supplying only the N 2 gas into the chamber; and
subsequently, forming the tungsten film by sequentially supplying the tungsten chloride gas and the reducing gas into the chamber while purging an interior of the chamber in the course of sequentially supplying the tungsten chloride gas and the reducing gas.
2. A tungsten film forming method for forming a tungsten film on a target substrate disposed inside a chamber kept under a depressurized atmosphere and having a base film formed on a surface thereof, using a tungsten chloride gas as a tungsten raw material gas and a reducing gas for reducing the tungsten chloride gas, the method comprising:
prior to supplying the tungsten chloride gas into the chamber, performing an SiH 4 gas treatment with respect to the target substrate having the base film formed thereon by supplying only an SiH 4 gas and an N 2 gas into the chamber for a predetermined time;
after the lapse of the predetermined time, terminating the SiH 4 gas treatment and then supplying only the N 2 gas into the chamber;
subsequently, performing a tungsten chloride gas treatment with respect to the target substrate subjected to the SiH 4 gas treatment by supplying the tungsten chloride gas into the chamber; and
subsequently, forming the tungsten film by sequentially supplying the tungsten chloride gas and the reducing gas into the chamber while purging an interior of the chamber in the course of sequentially supplying the tungsten chloride gas and the reducing gas.
3. The method of claim 2 , wherein the SiH 4 gas is adsorbed onto the base film by the SiH 4 gas treatment, the adsorbed SiH 4 gas and the tungsten chloride gas are caused to react with each other by the tungsten chloride gas treatment, and a layer having a lower surface activity than the SiH 4 gas is formed such that the reaction is saturated at a predetermined film thickness.
4. The method of claim 2 , wherein in the forming the tungsten film, the presence of the reducing gas is suppressed when supplying the tungsten chloride gas.
5. The method of claim 4 , wherein in the forming the tungsten film, the reducing gas is not added when supplying the tungsten chloride gas.
6. The method of claim 2 , wherein the act of performing the tungsten chloride gas treatment is performed using a WCl 6 gas.
7. The method of claim 6 , wherein the performing a tungsten chloride gas treatment is performed in a state in which a temperature of the target substrate is 300 degrees C. or higher and a pressure or a partial pressure of the WCl 6 gas falls within a range of 0.1 to 1Torr.
8. A tungsten film forming method for forming a tungsten film on a target substrate disposed inside a chamber kept under a depressurized atmosphere and having a base film formed on a surface thereof, using a tungsten chloride gas as a tungsten raw material gas and a reducing gas for reducing the tungsten chloride gas, the method comprising:
prior to supplying the tungsten chloride gas into the chamber, performing a SiH 4 gas treatment with respect to the target substrate having the base film formed thereon by supplying only an SiH 4 gas and an N 2 gas into the chamber for a predetermined time;
after the lapse of the predetermined time, terminating the SiH 4 gas treatment and then supplying only the N 2 gas into the chamber; and
subsequently, forming the tungsten film by sequentially supplying the tungsten chloride gas and the reducing gas into the chamber while purging an interior of the chamber in the course of sequentially supplying the tungsten chloride gas and the reducing gas,
wherein in the forming the tungsten film, the presence of the reducing gas is suppressed when supplying the tungsten chloride gas.
9. The method of claim 8 , wherein in the forming the tungsten film, the reducing gas is not added when supplying the tungsten chloride gas.
10. The method of claim 1 , wherein the SiH 4 gas is adsorbed onto the base film by the SiH 4 gas treatment.
11. The method of claim 1 , wherein the performing an SiH 4 gas treatment is performed in a state in which a temperature of the target substrate is 300 degrees C. or higher and a pressure or a partial pressure of the SiH 4 gas falls within a range of 0.1 to 3 Torr.
12. The method of claim 1 , wherein the forming the tungsten film is performed in a state in which a temperature of the target substrate is 300 degrees C. or higher and an internal pressure of the chamber is 5 Torr or higher.
13. The method of claim 1 , wherein the forming the tungsten film is performed by forming a first tungsten film with a relatively small supply amount of the tungsten chloride gas at an initial film formation stage and subsequently, forming a second tungsten film as a main film with a relatively large supply amount of the tungsten chloride gas.
14. The method of claim 1 , wherein the tungsten chloride used in the forming the tungsten film is one of WCl 6 , WCl 5 and WCl 4 .
15. The method of claim 1 , wherein the reducing gas is at least one of an H 2 gas, an SiH 4 gas, a B 2 H 6 gas and an NH 3 gas.
16. The method of claim 1 , wherein the base film includes a titanium-based material film or a tungsten compound film.
17. The method of claim 16 , wherein the base film is a TiN film.
18. A non-transitory computer-readable storage medium operating on a computer and storing a program for controlling a film forming apparatus,
wherein the program, when executed, causes the computer to control the film forming apparatus so as to perform the tungsten film forming method of claim 1 .