Patent Assignment
Reel/Frame 041852/0441
Assignment of Assignor's Interest
Recorded: 2017-04-05
Pages: 6
Assignors
JÄCKEL, OLIVER
Executed: 2017-03-29
BLÄSING-BANGERT, CAROLA
Executed: 2017-03-27
SEIDEL, DIRK
Executed: 2017-03-27
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Measuring Microscope for Measuring Masks for Lithographic Methods and Measuring Method and Calibration Method Therefor