Patent Assignment
Reel/Frame 041982/0274
Assignment of Assignor's Interest
Recorded: 2017-04-12
Pages: 3
Assignors
MORVAY, DANIEL
Executed: 2017-02-07
HAN, TAEJOON
Executed: 2017-02-07
VUKOVIC, MIRKO
Executed: 2017-02-10
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, AKASAKA BIZ TOWER, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Computed Tomography Using Intersecting Views of Plasma Using Optical Emission Spectroscopy During Plasma Processing
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.