Patent Assignment
Reel/Frame 047834/0381
Assignment of Assignor's Interest
Recorded: 2018-12-20
Pages: 8
Assignors
MORVAY, DANIEL
Executed: 2018-12-10
HAN, TAEJOON
Executed: 2018-12-18
VUKOVIC, MIRKO
Executed: 2018-12-18
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, AKASAKA BIZ TOWER, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Computed Tomography Using Intersecting Views of Plasma Using Optical Emission Spectroscopy During Plasma Processing
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.