Patent Assignment
Reel/Frame 042126/0543
Assignment of Assignor's Interest
Recorded: 2017-03-31
Pages: 3
Assignors
SHINOZAKI, HIROYUKI
Executed: 2017-03-16
KAMATA, SHUICHI
Executed: 2017-03-17
TAKEDA, KOICHI
Executed: 2017-03-17
KOSUGE, RYUICHI
Executed: 2017-03-16
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU, TOKYO 144-8510, JAPAN
Covered Property
(1)
Substrate Processing Apparatus