Patent Assignment
Reel/Frame 042206/0110
Assignment of Assignor's Interest
Recorded: 2017-05-02
Pages: 8
Assignors
BARALIA, GABRIEL
Executed: 2017-04-21
BAUR, CHRISTOF
Executed: 2017-04-21
EDINGER, KLAUS
Executed: 2017-04-21
HOFMANN, THORSTEN
Executed: 2017-04-21
BUDACH, MICHAEL
Executed: 2017-04-21
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Device and Method for Analysing a Defect of a Photolithographic Mask or of a Wafer