Patent Assignment
Reel/Frame 042238/0873
Assignment of Assignor's Interest
Recorded: 2017-05-04
Pages: 3
Assignee
NATIONAL SUN YAT-SEN UNIVERSITY
NO.70 LIEN-HAI RD., GUSHAN DISTRICT,, KAOHSIUNG CITY, TAIWAN
Covered Property
(1)
Laser Interference Lithography System with Flat-Top Intensity Profile