Patent Assignment
Reel/Frame 042364/0468
Assignment of Assignor's Interest
Recorded: 2017-05-12
Pages: 3
Assignor
HIROKI, TSUTOMU
Executed: 2017-04-17
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Stage and Substrate Processing Apparatus