Patent Assignment
Reel/Frame 042401/0184
Assignment of Assignor's Interest
Recorded: 2017-05-16
Pages: 4
Assignors
TAN, SAMANTHA
Executed: 2017-04-20
YU, JENGYI
Executed: 2017-04-20
WISE, RICHARD
Executed: 2017-04-20
SHAMMA, NADER
Executed: 2017-04-20
PAN, YANG
Executed: 2017-04-20
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Etching Substrates Using Ale and Selective Deposition