Patent Assignment
Reel/Frame 042410/0875
Assignment of Assignor's Interest
Recorded: 2017-05-17
Pages: 4
Assignors
TOMURA, MAJU
Executed: 2017-05-09
KATSUNUMA, TAKAYUKI
Executed: 2017-04-27
HONDA, MASANOBU
Executed: 2017-04-27
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Selective Plasma Etching Method of a First Region Containing a Silicon Atom and an Oxygen Atom