Patent Assignment
Reel/Frame 042680/0579
Assignment of Assignor's Interest
Recorded: 2017-06-12
Pages: 4
Assignor
PLATZGUMMER, ELMAR
Executed: 2017-05-30
Assignee
IMS NANOFABRICATION AG
SCHREYGASSE 3, VIENNA, 1020, AUSTRIA
Covered Property
(1)
Method for Compensating Pattern Placement Errors Caused by Variation of Pattern Exposure Density in a Multi-Beam Writer
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.