Patent Assignment
Reel/Frame 042725/0094
Assignment of Assignor's Interest
Recorded: 2017-06-15
Pages: 8
Assignors
FUKAYA, KOICHI
Executed: 2017-05-22
ISHIBASHI, TOMOATSU
Executed: 2017-05-22
NAKANO, HISAJIRO
Executed: 2017-05-22
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU, TOKYO, 144-8510, JAPAN
Covered Property
(1)
Substrate Washing Device