Patent Assignment
Reel/Frame 042757/0904
Assignment of Assignor's Interest
Recorded: 2017-06-20
Pages: 7
Assignors
HIROSE, YOSHIRO
Executed: 2017-06-16
SANO, ATSUSHI
Executed: 2017-06-19
HARADA, KATSUYOSHI
Executed: 2017-06-19
Assignee
HITACHI KOKUSAI ELECTRIC INC.
15-12, NISHI-SHIMBASHI 2-CHOME, MINATO-KU, TOKYO, 105-8039, JAPAN
Covered Property
(1)
Semiconductor Device Manufacturing Method, Substrate Processing Apparatus, and Recording Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.