Patent Assignment
Reel/Frame 042871/0179
Assignment of Assignor's Interest
Recorded: 2017-06-30
Pages: 3
Assignor
MA, SHAWMING
Executed: 2017-01-06
Assignee
MATTSON TECHNOLOGY, INC.
47131 BAYSIDE PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Atomic Layer Etch Process Using Plasma In Conjunction With A Rapid Thermal Activation Process
Related Assignments
(4)
Other recorded transfers of the patent in this record — the chain of ownership.
Security Interest
Aug 27, 2018
From: MATTSON TECHNOLOGY, INC.
To: EAST WEST BANK
Reel/Frame 046956/0348 →
Assignment of Assignor's Interest
Sep 30, 2019
From: MATTSON TECHNOLOGY, INC.
To: MATTSON TECHNOLOGY, INC.; BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY, CO., LTD
Reel/Frame 050582/0796 →
Security Interest
Oct 19, 2020
From: MATTSON TECHNOLOGY, INC.
To: EAST WEST BANK
Reel/Frame 054100/0167 →
Release of Security Interest
Apr 15, 2021
From: EAST WEST BANK
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 055950/0452 →