Patent Assignment
Reel/Frame 054100/0167
Security Interest
Recorded: 2020-10-19
Pages: 17
Assignor
MATTSON TECHNOLOGY, INC.
Executed: 2018-08-21
Assignee
EAST WEST BANK
2350 MISSION COLLEGE BLVD., SUITE 988, SANTA CLARA, CALIFORNIA, 95054
Covered Properties
(40)
Method for High Aspect Ratio Photoresist Removal in Pure Reducing Plasma
Preheat Processes for Millisecond Anneal System
Substrate Support in a Millisecond Anneal System
Features for Improving Process Uniformity in a Millisecond Anneal System
Atomic Layer Etch Process Using Plasma In Conjunction With A Rapid Thermal Activation Process
Strip Process for High Aspect Ratio Structure
Systems and Methods for Workpiece Processing
Plasma Processing Apparatus With Post Plasma Gas Injection
Thermal Imaging Of Heat Sources In Thermal Processing Systems
Surface Treatment of Silicon and Carbon Containing Films by Remote Plasma with Organic Precursors
Method for Processing a Workpiece Using a Multi-Cycle Thermal Treatment Process
Systems And Methods For Workpiece Processing Using Neutral Atom Beams
Multi-Function Fixture for a Lavatory System
Electrostatic Shield for Inductive Plasma Sources
Application:
16/245,973 →
Publication:
US 2020/0227239
Air Leak Detection In Plasma Processing Apparatus With Separation Grid
Support Plate for Localized Heating in Thermal Processing Systems
Surface Treatment of Carbon Containing Films Using Organic Radicals
Pre-Heat Processes for Millisecond Anneal System
Low Thermal Budget Annealing
Processing Of Workpieces With Reactive Species Generated Using Alkyl Halide
Methods and Apparatus for Post Exposure Bake Processing of a Workpiece
Post Etch Defluorination Process
Generation of Hydrogen Reactive Species For Processing of Workpieces
Surface Treatment of Silicon or Silicon Germanium Surfaces Using Organic Radicals
Systems And Methods For Thermal Processing And Temperature Measurement Of A Workpiece At Low Temperatures
Integration Of Materials Removal And Surface Treatment In Semiconductor Device Fabrication
Oxide Removal From Titanium Nitride Surfaces
Application:
16/534,149 →
Publication:
US 2020/0075313
Silicon Oxide Selective Dry Etch Process
Patent:
10,692,730 →
Application:
16/557,346 →
Method for High Aspect Ratio Photoresist Removal in Pure Reducing Plasma
Ozone for Selective Hydrophilic Surface Treatment
Water Vapor Based Fluorine Containing Plasma For Removal Of Hardmask
Application:
16/598,423 →
Publication:
US 2020/0135554
Carbon Containing Hardmask Removal Process Using Sulfur Containing Process Gas
Silicon Mandrel Etch After Native Oxide Punch-Through
Surface Smoothing of Workpieces
Post Plasma Gas Injection In A Separation Grid
Application:
16/744,244 →
Publication:
US 2020/0243305
Ozone Treatment for Selective Silicon Nitride Etch Over Silicon
Method for Processing a Workpiece Using a Multi-Cycle Thermal Treatment Process
Thermal Processing System With Temperature Non-Uniformity Control
Strip Process for High Aspect Ratio Structure
Pre-Heat Processes for Millisecond Anneal System
Related Assignments
(25)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignor's Interest
Dec 8, 2014
From: DIAO, LI; ELLISTON, ROBERT GEORGE; GILBERT, DAVID; LEE, CHAN-YUN
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 034418/0285 →
Assignment of Assignor's Interest
Dec 13, 2016
From: MATTSON THERMAL PRODUCTS GMBH
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 040723/0536 →
Assignment of Assignor's Interest
Dec 13, 2016
From: LIEBERER, MARKUS; PFAHLER, CHRISTIAN; HAGEDORN, MARKUS; COSCEEV, ALEXANDR
To: MATTSON THERMAL PRODUCTS GMBH
Reel/Frame 040723/0501 →
Assignment of Assignor's Interest
Dec 14, 2016
From: MATTSON THERMAL PRODUCTS GMBH
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 040734/0089 →
Assignment of Assignor's Interest
Dec 14, 2016
From: COSCEEV, ALEXANDR; HAGEDORN, MARKUS; PFAHLER, CHRISTIAN
To: MATTSON THERMAL PRODUCTS GMBH
Reel/Frame 040733/0976 →
Assignment of Assignor's Interest
Dec 14, 2016
From: MATTSON THERMAL PRODUCTS GMBH
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 040733/0513 →
Assignment of Assignor's Interest
Dec 14, 2016
From: CIBERE, JOSEPH
To: MATTSON THERMAL PRODUCTS GMBH
Reel/Frame 040733/0355 →
Assignment of Assignor's Interest
May 17, 2017
From: VANIAPURA, VIJAY M.; MA, SHAWMING; HOU, LI
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 042485/0586 →
Assignment of Assignor's Interest
May 17, 2017
From: VANIAPURA, VIJAY M.; MA, SHAWMING
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 042409/0378 →
Assignment of Assignor's Interest
Jun 30, 2017
From: MA, SHAWMING
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 042871/0179 →
Assignment of Assignor's Interest
Oct 6, 2017
From: YANG, MICHAEL; PAKULSKI, RYAN
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 043802/0303 →
Assignment of Assignor's Interest
Feb 21, 2018
From: MA, SHAWMING; NAGORNY, VLADIMIR; DESAI, DIXIT V.; PAKULSKI, RYAN M.
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 044991/0785 →
Assignment of Assignor's Interest
May 21, 2018
From: YANG, MICHAEL X.
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 045860/0189 →
Assignment of Assignor's Interest
Jun 11, 2018
From: YANG, MICHAEL X.; CHUNG, HUA; LU, XINLIANG
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 046044/0895 →
Assignment of Assignor's Interest
Aug 17, 2018
From: YANG, MICHAEL X.; MA, SHAWMING
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 046857/0731 →
Assignment of Assignor's Interest
Aug 21, 2018
From: SAVAS, STEPHEN E.
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 046638/0974 →
Security Interest
Aug 27, 2018
From: MATTSON TECHNOLOGY, INC.
To: EAST WEST BANK
Reel/Frame 046956/0348 →
Assignment of Assignor's Interest
Feb 1, 2019
From: SAVAS, STEPHEN EDWARD; CHEN, CHEN-AN; MA, SHAWMING
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 048217/0675 →
Assignment of Assignor's Interest
Feb 6, 2019
From: MENG, SHUANG; LU, XINLIANG; MA, SHAWMING; CHUNG, HUA
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 048248/0883 →
Assignment of Assignor's Interest
Mar 18, 2019
From: MATTSON THERMAL PRODUCTS GMBH
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 048625/0953 →
Assignment of Assignor's Interest
Mar 18, 2019
From: BREMENSDORFER, ROLF; KEPPLER, JOHANNES; HULSMANN, THORSTEN
To: MATTSON THERMAL PRODUCTS GMBH
Reel/Frame 048625/0685 →
Assignment of Assignor's Interest
Mar 18, 2019
From: YANG, MICHAEL X.
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 048625/0589 →
Assignment of Assignor's Interest
Mar 19, 2019
From: YANG, MICHAEL X.; CHUNG, HUA; LU, XINLIANG
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 048638/0183 →
Security Interest
Sep 6, 2019
From: MATTSON TECHNOLOGY, INC.
To: EAST WEST BANK
Reel/Frame 050299/0372 →
Assignment of Assignor's Interest
Sep 30, 2019
From: MATTSON TECHNOLOGY, INC.
To: MATTSON TECHNOLOGY, INC.; BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY, CO., LTD
Reel/Frame 050582/0796 →