Substrate support in a millisecond anneal system
View Patent ↗Systems and methods for substrate support in a millisecond anneal system are provided. In one example implementation, a millisecond anneal system includes a processing chamber having a wafer support plate. A plurality of support pins can extend from the wafer support plate. The support pins can be configured to support a substrate. At least one of the support pins can have a spherical surface profile to accommodate a varying angle of a substrate surface normal at the point of contact with the substrate. Other example aspects of the present disclosure are directed to methods for estimating, for instance, local contact stress at the point of contact with the support pin.
1. A millisecond anneal system, comprising:
a processing chamber having a wafer support plate;
a plurality of support pins extending from the wafer support plate configured to support a substrate;
wherein at least one of the support pins has a spherical surface profile to accommodate a varying angle of a substrate surface normal at the point of contact with the substrate;
wherein the spherical surface profile has a span associated with at least two times a maximum angle of the substrate surface normal at a point of contact with the substrate, wherein the spherical surface profile has a radius of curvature determined based on a cross-sectional width of a base structure supporting the spherical profile.
2. The millisecond anneal system of claim 1 , wherein the maximum angle is in the range of about 2° to about 8° .
3. The millisecond anneal system of claim 1 , wherein the plurality of support pins comprises a first support pin located at a first radial distance relative to a center of a substrate and a second support pin located at a second radial distance relative to a center of the substrate, the second radial distance being greater than the first radial distance.
4. The millisecond anneal system of claim 3 , wherein the first support pin has a spherical surface profile with a first span and the second support pin has a spherical surface profile with a second span, the second span being greater than the first span.
5. The millisecond anneal system of claim 1 , wherein the spherical surface profile is polished.
6. The millisecond anneal system of claim 1 , wherein the support pin comprises a quartz material.
7. The millisecond anneal system of claim 1 , wherein the base structure is a vertical base structure.
8. The millisecond anneal system of claim 1 , wherein the base structure is an angled base structure.
9. The millisecond anneal system of claim 1 , wherein the base structure has a T-shaped cross-section.
10. A wafer support plate configured to support a substrate in a thermal processing system, comprising:
a plurality of support pins;
wherein at least one of the support pins has a spherical surface profile to accommodate a varying angle of a substrate surface normal at the point of contact with the substrate;
wherein the spherical surface profile has a span associated with at least two times a maximum angle of the substrate surface normal at a point of contact with the substrate, wherein the spherical surface profile has a radius of curvature determined based on a cross-sectional width of a base structure supporting the spherical profile.
11. The wafer support plate of claim 10 , wherein the maximum angle is in the range of about 2° to about 8° .
12. The wafer support plate of claim 10 , wherein the plurality of support pins comprises a first support pin located at a first radial distance relative to a center of the wafer support plate and a second support pin located at a second radial distance relative to a center of the wafer support plate, the second radial distance being greater than the first radial distance.
13. The wafer support plate of claim 12 , wherein the first support pin has a spherical surface profile with a first span and the second support pin has a spherical surface profile with a second span, the second span being greater than the first span.
14. The wafer support plate of claim 10 , wherein the spherical surface profile is polished.
15. The wafer support plate of claim 10 , wherein the support pin comprises a quartz material.