Patent Assignment
Reel/Frame 050299/0372
Security Interest
Recorded: 2019-09-06
Pages: 15
Assignor
MATTSON TECHNOLOGY, INC.
Executed: 2018-08-21
Assignee
EAST WEST BANK
2350 MISSION COLLEGE BLVD., SUITE 988, SANTA CLARA, CALIFORNIA, 95054
Covered Properties
(33)
Torsionally Flexible Coupling, a Mold, and a Method of Producing Same
Miniature Vertically Polarized Multiple Frequency Band Antenna and Method of Providing an Antenna for a Wireless Device
Plasma Processing Apparatus With Post Plasma Gas Injection
Plasma Strip Tool With Uniformity Control
Plasma Processing Apparatus
Application:
15/888,283 →
Publication:
US 2018/0358206
Plasma Strip Tool With Multiple Gas Injection Zones
Application:
15/892,723 →
Publication:
US 2018/0358204
Thermal Imaging Of Heat Sources In Thermal Processing Systems
Method for Processing a Workpiece Using a Multi-Cycle Thermal Treatment Process
Thermal Processing of Closed Shape Workpieces
Cooled Focus Ring for Plasma Processing Apparatus
Application:
16/103,100 →
Publication:
US 2019/0088512
Inductively Coupled Plasma Wafer Bevel Strip Apparatus
Application:
16/162,741 →
Publication:
US 2019/0131112
Processing of Semiconductors Using Vaporized Solvents
Plasma Processing Apparatus and Methods
Application:
16/218,931 →
Publication:
US 2019/0198301
Surface Treatment of Substrates Using Passivation Layers
Surface Treatment of Carbon Containing Films Using Organic Radicals
Controlling Azimuthal Uniformity of Etch Process in Plasma Processing Chamber
Application:
16/386,557 →
Publication:
US 2019/0244825
Thermal Processing of Closed Shape Workpieces
Application:
62/546,269 →
Cooled Focus Ring for Plasma Processing Apparatus
Application:
62/559,778 →
Surface Treatment of Silicon and Carbon Containing Films by Remote Plasma with Organic Precursors
Application:
62/567,295 →
Inductively Coupled Plasma Wafer Bevel Strip Apparatus
Application:
62/578,725 →
Surface Treatment Of Semiconductors Using Vaporized Solvents
Application:
62/599,105 →
Plasma Processing Apparatus and Methods
Application:
62/610,573 →
Plasma Strip Tool With Multiple Gas Injection Zones
Application:
62/610,582 →
Plasma Strip Tool With Uniformity Control
Application:
62/610,588 →
Plasma Processing Apparatus With Plasma Source Tunability
Application:
62/610,601 →
Support Plate for Localized Heating in Thermal Processing Systems
Application:
62/645,476 →
Low Thermal Budget Annealing
Application:
62/656,428 →
Processing Of Workpieces With Reactive Species Generated Using Alkyl Halide
Application:
62/657,114 →
Processing Of Workpieces With Reactive Species Generated Using Alkyl Halide
Application:
62/658,117 →
Generation of Hydrogen Reactive Species For Processing of Workpieces
Application:
62/683,246 →
Method for Processing a Workpiece Using a Multi-Cycle Thermal Treatment Process
Application:
62/685,564 →
Methods and Apparatus for Post Exposure Bake Processing of a Workpiece
Application:
62/685,608 →
Post Etch Defluorination Process
Application:
62/689,475 →
Related Assignments
(25)
Other recorded transfers of the patents in this record — the chain of ownership.
Security Agreement
Nov 6, 2013
From: FREESCALE SEMICONDUCTOR, INC.
To: CITIBANK, N.A., AS NOTES COLLATERAL AGENT
Reel/Frame 031591/0266 →
Patent Release
Dec 21, 2015
From: CITIBANK, N.A., AS COLLATERAL AGENT
To: FREESCALE SEMICONDUCTOR, INC.
Reel/Frame 037354/0225 →
Patent Release
Dec 21, 2015
From: CITIBANK, N.A., AS COLLATERAL AGENT
To: FREESCALE SEMICONDUCTOR, INC.
Reel/Frame 037356/0553 →
Patent Release
Dec 21, 2015
From: CITIBANK, N.A., AS COLLATERAL AGENT
To: FREESCALE SEMICONDUCTOR, INC.
Reel/Frame 037356/0143 →
Patent Release
Dec 21, 2015
From: CITIBANK, N.A., AS COLLATERAL AGENT
To: FREESCALE SEMICONDUCTOR, INC.
Reel/Frame 037354/0719 →
Assignment and Assumption of Security Interest in Patents
Jan 12, 2016
From: CITIBANK, N.A.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 037486/0517 →
Assignment and Assumption of Security Interest in Patents
Jan 13, 2016
From: CITIBANK, N.A.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 037518/0292 →
Assignment of Assignor's Interest
Feb 4, 2016
From: FREESCALE SEMICONDUCTOR, INC.
To: NORTH STAR INNOVATIONS INC.
Reel/Frame 037694/0264 →
Release of Security Interest
Sep 21, 2016
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: NXP, B.V., F/K/A FREESCALE SEMICONDUCTOR, INC.
Reel/Frame 040925/0001 →
Release of Security Interest
Nov 7, 2016
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: NXP B.V.
Reel/Frame 040928/0001 →
Corrective Assignment to Correct the Remove Patents 8108266 and 8062324 and Replace Them with 6108266 and 8060324 Previously Recorded on Reel 037518 Frame 0292. Assignor(S) Hereby Confirms the Assignment and Assumption of Security Interest in Patents.
Feb 1, 2017
From: CITIBANK, N.A.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 041703/0536 →
Assignment of Assignor's Interest
Sep 20, 2017
From: YANG, MICHAEL
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 043641/0765 →
Assignment of Assignor's Interest
Sep 21, 2017
From: MATTSON THERMAL PRODUCTS GMBH
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 043654/0897 →
Assignment of Assignor's Interest
Sep 21, 2017
From: BREMENSDORFER, ROLF; KEPPLER, JOHANNES
To: MATTSON THERMAL PRODUCTS GMBH
Reel/Frame 043654/0778 →
Assignment of Assignor's Interest
Sep 27, 2017
From: ZUCKER, MARTIN L.
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 043709/0277 →
Assignment of Assignor's Interest
Oct 27, 2017
From: YANG, MICHAEL X.
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 043966/0305 →
Assignment of Assignor's Interest
Nov 15, 2017
From: MA, SHAWMING; DESAI, DIXIT V.; PAKULSKI, RYAN M.
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 044127/0633 →
Assignment of Assignor's Interest
Jan 22, 2018
From: MENG, SHUANG; MA, SHAWMING; YANG, MICHAEL X.
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 044690/0414 →
Assignment of Assignor's Interest
Jan 22, 2018
From: MA, SHAWMING; CHUNG, HUA; YANG, MICHAEL X.; DESAI, DIXIT V.
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 044690/0295 →
Assignment of Assignor's Interest
Feb 21, 2018
From: MA, SHAWMING; NAGORNY, VLADIMIR; DESAI, DIXIT V.; PAKULSKI, RYAN M.
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 044991/0785 →
Assignment of Assignor's Interest
Feb 21, 2018
From: MA, SHAWMING; NAGORNY, VLADIMIR; DESAI, DIXIT V.; PAKULSKI, RYAN M.
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 044991/0826 →
Assignment of Assignor's Interest
Feb 21, 2018
From: MA, SHAWMING; NAGORNY, VLADIMIR; DESAI, DIXIT V.; PAKULSKI, RYAN M.
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 044991/0901 →
Assignment of Assignor's Interest
Feb 21, 2018
From: MA, SHAWMING; NAGORNY, VLADIMIR; DESAI, DIXIT V.; PAKULSKI, RYAN M.
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 044992/0022 →
Assignment of Assignor's Interest
Feb 26, 2018
From: MA, SHAWMING; NAGORNY, VLADIMIR; DESAI, DIXIT V.; PAKULSKI, RYAN M.
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 045041/0060 →
Assignment of Assignor's Interest
Feb 26, 2018
From: MA, SHAWMING; NAGORNY, VLADIMIR; DESAI, DIXIT V.; PAKULSKI, RYAN M.
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 045040/0984 →