Patent Application
Utility
App. No. 16/218,931
· Confirmation No. 7822
Plasma Processing Apparatus and Methods
Abandoned -- Failure to Respond to an Office Action
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2023-03-02 | ABN |
Abandonment | 2 | View | |
| 2022-09-28 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 1 | View | |
| 2022-09-28 | FOR |
Foreign Reference | 56 | View | |
| 2022-09-28 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2022-09-28 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2022-09-28 | IDS.R197.REL |
Letter specifying the conditions for filing under 37 CFR 1.97 | 3 | View | |
| 2022-08-05 | CTNF |
Non-Final Rejection | 22 | View | |
| 2022-08-05 | 892 |
List of references cited by examiner | 1 | View | |
| 2022-08-05 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2022-08-05 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2022-08-05 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2022-08-05 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2022-08-05 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2022-08-05 | SRNT |
Examiner's search strategy and results | 2 | View | |
| 2022-04-20 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 1 | View | |
| 2022-04-20 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2022-04-20 | TRAN.LET |
Transmittal Letter | 3 | View | |
| 2022-01-20 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2022-01-20 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 1 | View | |
| 2022-01-20 | FOR |
Foreign Reference | 63 | View | |
| 2022-01-20 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2022-01-20 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2022-01-20 | RCEX |
Request for Continued Examination (RCE) | 2 | View | |
| 2022-01-20 | AMSB |
Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) | 1 | View | |
| 2022-01-20 | CLM |
Claims | 2 | View | |
| 2022-01-20 | REM |
Applicant Arguments/Remarks Made in an Amendment | 8 | View | |
| 2022-01-20 | IDS.R197.REL |
Letter specifying the conditions for filing under 37 CFR 1.97 | 3 | View | |
| 2022-01-13 | EXIN |
Examiner Interview Summary Record (PTOL - 413) | 3 | View | |
| 2022-01-13 | OA.APPENDIX |
Office Action Appendix | 3 | View | |
| 2021-11-12 | CTFR |
Final Rejection | 45 | View | |
| 2021-11-12 | 892 |
List of references cited by examiner | 1 | View | |
| 2021-11-12 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2021-11-12 | SRNT |
Examiner's search strategy and results | 2 | View | |
| 2021-11-12 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2021-11-12 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2021-11-12 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2021-09-29 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 1 | View | |
| 2021-09-29 | FOR |
Foreign Reference | 17 | View | |
| 2021-09-29 | FOR |
Foreign Reference | 32 | View | |
| 2021-09-29 | FOR |
Foreign Reference | 34 | View | |
| 2021-09-29 | FOR |
Foreign Reference | 39 | View | |
| 2021-09-29 | FOR |
Foreign Reference | 90 | View | |
| 2021-09-29 | FOR |
Foreign Reference | 30 | View | |
| 2021-09-29 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2021-09-29 | N417 |
Electronic Filing System Acknowledgment Receipt | 4 | View | |
| 2021-09-29 | TRAN.LET |
Transmittal Letter | 3 | View | |
| 2021-09-29 | FOR |
Foreign Reference | 66 | View | |
| 2021-09-21 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2021-09-21 | CLM |
Claims | 4 | View | |
| 2021-09-21 | REM |
Applicant Arguments/Remarks Made in an Amendment | 10 | View | |
| 2021-09-21 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2021-09-21 | TRAN.LET |
Transmittal Letter | 2 | View | |
| 2021-09-21 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2021-08-31 | EXIN |
Examiner Interview Summary Record (PTOL - 413) | 2 | View | |
| 2021-08-31 | OA.APPENDIX |
Office Action Appendix | 6 | View | |
| 2021-06-25 | EBCC.AD |
Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update | 1 | View | |
| 2021-06-25 | CTNF |
Non-Final Rejection | 45 | View | |
| 2021-06-25 | 892 |
List of references cited by examiner | 1 | View | |
| 2021-06-25 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2021-06-25 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2021-06-25 | FOR |
Foreign Reference | 6 | View | |
| 2021-04-27 | RCEX |
Request for Continued Examination (RCE) | 2 | View | |
| 2021-04-27 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2021-04-27 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2021-04-23 | CTAV |
Advisory Action (PTOL-303) | 3 | View | |
| 2021-04-23 | EXIN |
Examiner Interview Summary Record (PTOL - 413) | 1 | View | |
| 2021-04-23 | A.NE.AFCP.D |
After Final Consideration Program Decision | 1 | View | |
| 2021-04-23 | ANE.I |
Amendment After Final or under 37CFR 1.312, initialed by the examiner. | 3 | View | |
| 2021-04-08 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2021-04-08 | A.NE |
Response After Final Action | 3 | View | |
| 2021-04-08 | CLM |
Claims | 4 | View | |
| 2021-04-08 | REM |
Applicant Arguments/Remarks Made in an Amendment | 5 | View | |
| 2021-04-08 | A.NE.AFCP |
After Final Consideration Program Request | 1 | View | |
| 2021-04-08 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2021-04-08 | TRAN.LET |
Transmittal Letter | 2 | View | |
| 2021-04-08 | AMSB |
Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) | 1 | View | |
| 2021-02-09 | CTFR |
Final Rejection | 28 | View | |
| 2021-02-09 | 892 |
List of references cited by examiner | 1 | View | |
| 2021-02-09 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2021-02-09 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2021-02-09 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2021-02-09 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2021-02-01 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2021-02-01 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2021-01-11 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2021-01-11 | REM |
Applicant Arguments/Remarks Made in an Amendment | 1 | View | |
| 2021-01-11 | CLM |
Claims | 4 | View | |
| 2021-01-11 | REM |
Applicant Arguments/Remarks Made in an Amendment | 8 | View | |
| 2021-01-11 | DRW |
Drawings-only black and white line drawings | 4 | View | |
| 2021-01-11 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2021-01-11 | TRAN.LET |
Transmittal Letter | 2 | View | |
| 2021-01-11 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2020-10-09 | CTNF |
Non-Final Rejection | 25 | View | |
| 2020-10-09 | 892 |
List of references cited by examiner | 1 | View | |
| 2020-10-09 | SRFW |
Search information including classification, databases and other search related notes | 2 | View | |
| 2020-10-09 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2020-10-09 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2020-10-09 | SRNT |
Examiner's search strategy and results | 2 | View | |
| 2020-10-09 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2020-10-09 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2020-10-09 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2020-10-09 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2020-10-09 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2020-10-09 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2020-10-09 | BIB |
Bibliographic Data Sheet | 1 | View | |
| 2020-09-18 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2020-09-18 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2020-08-27 | N570 |
Communication - Re: Power of Attorney (PTOL-308) | 1 | View | |
| 2020-08-27 | APP.FILE.REC |
Filing Receipt | 4 | View | |
| 2020-08-24 | CFILE |
Request for Corrected Filing Receipt | 1 | View | |
| 2020-08-24 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2020-08-24 | PA.. |
Power of Attorney | 3 | View | |
| 2020-08-24 | ADS |
Application Data Sheet | 9 | View | |
| 2020-08-24 | R3.73 |
Assignee showing of ownership per 37 CFR 3.73 | 1 | View | |
| 2020-07-23 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 1 | View | |
| 2020-07-23 | REF.OTHER |
Other reference-Patent/Application/Search Documents | 9 | View | |
| 2020-07-23 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2020-07-23 | TRAN.LET |
Transmittal Letter | 3 | View | |
| 2020-06-24 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2020-06-24 | ELC. |
Response to Election / Restriction Filed | 1 | View | |
| 2020-06-24 | CLM |
Claims | 4 | View | |
| 2020-06-24 | REM |
Applicant Arguments/Remarks Made in an Amendment | 1 | View | |
| 2020-06-24 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2020-06-24 | TRAN.LET |
Transmittal Letter | 2 | View | |
| 2020-05-01 | CTRS |
Requirement for Restriction/Election | 6 | View | |
| 2019-06-27 | NTC.PUB |
Notice of Publication | 1 | View | |
| 2019-04-25 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 1 | View | |
| 2019-04-25 | FOR |
Foreign Reference | 14 | View | |
| 2019-04-25 | REF.OTHER |
Other reference-Patent/Application/Search Documents | 14 | View | |
| 2019-04-25 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2019-04-25 | TRAN.LET |
Transmittal Letter | 3 | View | |
| 2019-02-27 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 1 | View | |
| 2019-02-27 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2019-02-27 | TRAN.LET |
Transmittal Letter | 3 | View | |
| 2019-02-08 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2019-02-07 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2019-02-05 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2019-02-05 | CFILE |
Request for Corrected Filing Receipt | 1 | View | |
| 2019-02-05 | LET. |
Miscellaneous Incoming Letter | 2 | View | |
| 2019-02-05 | ADS |
Application Data Sheet | 7 | View | |
| 2019-02-05 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2019-02-05 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2019-02-05 | TRAN.LET |
Transmittal Letter | 2 | View | |
| 2019-02-05 | OATH |
Oath or Declaration filed | 3 | View | |
| 2019-01-11 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2019-01-11 | M327 |
Miscellaneous Communication to Applicant - No Action Count | 1 | View | |
| 2019-01-11 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2018-12-13 | PA.. |
Power of Attorney | 2 | View | |
| 2018-12-13 | TRNA |
Transmittal of New Application | 1 | View | |
| 2018-12-13 | 136A |
Authorization for Extension of Time all replies | 1 | View | |
| 2018-12-13 | ADS |
Application Data Sheet | 9 | View | |
| 2018-12-13 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 1 | View | |
| 2018-12-13 | TRAN.LET |
Transmittal Letter | 3 | View | |
| 2018-12-13 | DRW |
Drawings-only black and white line drawings | 9 | View | |
| 2018-12-13 | ABST |
Abstract | 1 | View | |
| 2018-12-13 | CLM |
Claims | 4 | View | |
| 2018-12-13 | SPEC |
Specification | 20 | View | |
| 2018-12-13 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2018-12-13 | N417 |
Electronic Filing System Acknowledgment Receipt | 4 | View |
Inventors
Shawming Ma
Sunnyvale, CA
Hua Chung
Saratoga, CA
Michael X. Yang
Palo Alto, CA
Dixit V. Desai
Pleasanton, CA
Ryan M. Pakulski
Brentwood, CA
Attorneys & Agents of Record
Classification
USPC
156/345.35
H01J37/3244
H01J37/32899
H10P50/287
H10P72/7612
H10P50/246
H10P50/267
H10P50/285
H10P50/242
H10P50/283
H01J37/321
H01J37/32119
H01J37/32357
H01J37/32422
H01J37/32449
H01J37/32458
H01J37/32568
H01J37/32715
H01J37/32834
H01J2237/3341
H01J2237/3342
H01J2237/3345
Prosecution
- Examiner
- ALEJANDRO MULERO, LUZ L
- Art Unit
- 1716
- Customer No.
- 177432
- Docket No.
- AGX-265
- Confirmation No.
- 7822
Publication
- Pub. No.
- US20190198301A1
- Pub. Date
- 2019-06-27
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2019-09-30
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2018-12-13
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Quick Facts
- App. No.
- 16/218,931
- Filed
- 2018-12-13
- Pub. No.
- US20190198301A1
- Examiner
- ALEJANDRO MULERO, LUZ L
- Art Unit
- 1716
External Links