Patent Application
Utility
App. No. 17/225,547
· Confirmation No. 5440
Plasma Processing Apparatus and Methods
Abandoned -- After Examiner's Answer or Board of Appeals Decision
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2025-05-28 | ABN |
Abandonment | 2 | View | |
| 2025-03-19 | APDA |
Patent Board Decision - Examiner Affirmed | 15 | View | |
| 2024-01-04 | AP_DK_M |
Appeal Docketing Notice | 2 | View | |
| 2023-12-28 | N417.PYMT |
Electronic Fee Payment | 2 | View | |
| 2023-12-28 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2023-12-28 | APRB |
Reply Brief Filed | 7 | View | |
| 2023-11-01 | APEA |
Examiner's Answer to Appeal Brief | 33 | View | |
| 2023-08-22 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2023-08-22 | AP.B |
Appeal Brief Filed | 5 | View | |
| 2023-08-21 | APBD |
Notice - Defective Appeal Brief | 2 | View | |
| 2023-08-02 | AP.B |
Appeal Brief Filed | 25 | View | |
| 2023-08-02 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2023-08-02 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2023-04-03 | N/AP |
Notice of Appeal Filed | 2 | View | |
| 2023-04-03 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2023-04-03 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2023-02-22 | OA.POSTCARD |
A courtesy postcard sent by USPTO to users who opt-in for e-Office Action | 1 | View | |
| 2023-02-02 | CTFR |
Final Rejection | 23 | View | |
| 2023-02-02 | 892 |
List of references cited by examiner | 1 | View | |
| 2023-02-02 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2023-02-02 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2023-02-02 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2023-02-02 | SRNT |
Examiner's search strategy and results | 7 | View | |
| 2023-02-02 | 1449 |
List of References cited by applicant and considered by examiner | 2 | View | |
| 2023-02-02 | SRNT |
Examiner's search strategy and results | 3 | View | |
| 2023-02-02 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2023-01-13 | EXIN |
Examiner Interview Summary Record (PTOL - 413) | 3 | View | |
| 2023-01-13 | OA.APPENDIX |
Office Action Appendix | 2 | View | |
| 2023-01-11 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2023-01-11 | CLM |
Claims | 3 | View | |
| 2023-01-11 | REM |
Applicant Arguments/Remarks Made in an Amendment | 3 | View | |
| 2023-01-11 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2023-01-11 | TRAN.LET |
Transmittal Letter | 2 | View | |
| 2023-01-11 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2022-12-30 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 2 | View | |
| 2022-12-30 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2022-12-30 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2022-12-30 | TRAN.LET |
Transmittal Letter | 3 | View | |
| 2022-10-14 | CTNF |
Non-Final Rejection | 22 | View | |
| 2022-10-14 | 892 |
List of references cited by examiner | 1 | View | |
| 2022-10-14 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2022-10-14 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2022-10-14 | SRNT |
Examiner's search strategy and results | 5 | View | |
| 2022-10-14 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2022-10-14 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2022-09-28 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 1 | View | |
| 2022-09-28 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2022-09-28 | IDS.R197.REL |
Letter specifying the conditions for filing under 37 CFR 1.97 | 3 | View | |
| 2022-04-25 | AMSB |
Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) | 1 | View | |
| 2022-04-25 | CLM |
Claims | 3 | View | |
| 2022-04-25 | REM |
Applicant Arguments/Remarks Made in an Amendment | 7 | View | |
| 2022-04-25 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2022-04-25 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2022-04-25 | TRAN.LET |
Transmittal Letter | 2 | View | |
| 2022-04-25 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2022-04-25 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2022-04-25 | RCEX |
Request for Continued Examination (RCE) | 1 | View | |
| 2022-04-20 | EXIN |
Examiner Interview Summary Record (PTOL - 413) | 3 | View | |
| 2022-04-20 | OA.APPENDIX |
Office Action Appendix | 2 | View | |
| 2022-03-29 | M865E |
Electronic Request for Interview with Examiner | 1 | View | |
| 2022-02-07 | CTFR |
Final Rejection | 19 | View | |
| 2022-02-07 | 892 |
List of references cited by examiner | 1 | View | |
| 2022-02-07 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2022-02-07 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2022-02-07 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2022-02-07 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2021-12-14 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2021-12-14 | EXIN |
Examiner Interview Summary Record (PTOL - 413) | 3 | View | |
| 2021-12-14 | OA.APPENDIX |
Office Action Appendix | 3 | View | |
| 2021-12-14 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 3 | View | |
| 2021-12-14 | CLM |
Claims | 2 | View | |
| 2021-12-14 | REM |
Applicant Arguments/Remarks Made in an Amendment | 4 | View | |
| 2021-12-14 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2021-09-29 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 1 | View | |
| 2021-09-29 | FOR |
Foreign Reference | 30 | View | |
| 2021-09-29 | FOR |
Foreign Reference | 17 | View | |
| 2021-09-29 | FOR |
Foreign Reference | 32 | View | |
| 2021-09-29 | FOR |
Foreign Reference | 34 | View | |
| 2021-09-29 | FOR |
Foreign Reference | 39 | View | |
| 2021-09-29 | FOR |
Foreign Reference | 90 | View | |
| 2021-09-29 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2021-09-29 | N417 |
Electronic Filing System Acknowledgment Receipt | 4 | View | |
| 2021-09-29 | TRAN.LET |
Transmittal Letter | 3 | View | |
| 2021-09-29 | FOR |
Foreign Reference | 66 | View | |
| 2021-09-15 | CTNF |
Non-Final Rejection | 13 | View | |
| 2021-09-15 | 892 |
List of references cited by examiner | 1 | View | |
| 2021-09-15 | SRFW |
Search information including classification, databases and other search related notes | 2 | View | |
| 2021-09-15 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2021-09-15 | 1449 |
List of References cited by applicant and considered by examiner | 2 | View | |
| 2021-09-15 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2021-09-15 | SRNT |
Examiner's search strategy and results | 13 | View | |
| 2021-09-15 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2021-09-15 | BIB |
Bibliographic Data Sheet | 1 | View | |
| 2021-09-15 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2021-09-15 | SRNT |
Examiner's search strategy and results | 2 | View | |
| 2021-09-15 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2021-09-15 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2021-09-08 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2021-09-08 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2021-08-19 | NTC.PUB |
Notice of Publication | 1 | View | |
| 2021-07-30 | CLM |
Claims | 2 | View | |
| 2021-07-30 | REM |
Applicant Arguments/Remarks Made in an Amendment | 1 | View | |
| 2021-07-30 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2021-07-30 | TRAN.LET |
Transmittal Letter | 2 | View | |
| 2021-07-30 | ELC. |
Response to Election / Restriction Filed | 1 | View | |
| 2021-07-30 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2021-06-25 | EBCC.AD |
Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update | 1 | View | |
| 2021-06-10 | CTRS |
Requirement for Restriction/Election | 6 | View | |
| 2021-05-28 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 1 | View | |
| 2021-05-28 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2021-05-28 | TRAN.LET |
Transmittal Letter | 3 | View | |
| 2021-05-20 | TRACK1.GRANT |
Track One request Granted | 2 | View | |
| 2021-05-11 | APP.FILE.REC |
Filing Receipt | 4 | View | |
| 2021-04-09 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2021-04-09 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2021-04-08 | TRACK1.REQ |
Track One Request | 1 | View | |
| 2021-04-08 | TRAN.LET |
Transmittal Letter | 3 | View | |
| 2021-04-08 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 2 | View | |
| 2021-04-08 | SPEC |
Specification | 20 | View | |
| 2021-04-08 | CLM |
Claims | 4 | View | |
| 2021-04-08 | ABST |
Abstract | 1 | View | |
| 2021-04-08 | DRW |
Drawings-only black and white line drawings | 9 | View | |
| 2021-04-08 | OATH |
Oath or Declaration filed | 3 | View | |
| 2021-04-08 | A.PE |
Preliminary Amendment | 1 | View | |
| 2021-04-08 | SPEC |
Specification | 1 | View | |
| 2021-04-08 | CLM |
Claims | 2 | View | |
| 2021-04-08 | REM |
Applicant Arguments/Remarks Made in an Amendment | 1 | View | |
| 2021-04-08 | ADS |
Application Data Sheet | 9 | View | |
| 2021-04-08 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2021-04-08 | N417 |
Electronic Filing System Acknowledgment Receipt | 4 | View | |
| 2021-04-08 | TRNA |
Transmittal of New Application | 1 | View | |
| 2021-04-08 | PA.. |
Power of Attorney | 3 | View | |
| 2021-04-08 | 136A |
Authorization for Extension of Time all replies | 1 | View | |
| 2021-04-08 | TRAN.LET |
Transmittal Letter | 1 | View |
Inventors
Shawming Ma
Sunnyvale, CA
Hua Chung
Saratoga, CA
Michael X. Yang
Palo Alto, CA
Dixit V. Desai
Pleasanton, CA
Ryan M. Pakulski
Discovery Bay, CA
Attorneys & Agents of Record
Classification
USPC
156/345.35
H01J37/32899
H01J37/321
H01J37/32119
H01J37/32357
H01J37/32449
H01J37/32458
H01J37/32568
H01J37/32715
H01J37/32834
H01J2237/3341
H01J2237/3342
H01J2237/3345
H01L21/30621
H01L21/3065
H01L21/31116
H01L21/31122
H01L21/31138
H01L21/32136
H01L21/68742
Prosecution
- Examiner
- ALEJANDRO MULERO, LUZ L
- Art Unit
- 1716
- Customer No.
- 177432
- Docket No.
- AGX-265-CON
- Confirmation No.
- 5440
Publication
- Pub. No.
- US20210257196A1
- Pub. Date
- 2021-08-19
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2021-08-23
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2021-08-23
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Quick Facts
- App. No.
- 17/225,547
- Filed
- 2021-04-08
- Pub. No.
- US20210257196A1
- Examiner
- ALEJANDRO MULERO, LUZ L
- Art Unit
- 1716
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