Patent Application
Provisional
App. No. 62/610,573
· Confirmation No. 8334
Plasma Processing Apparatus and Methods
Applicant:
Mattson Technology, Inc.
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2021-06-25 | EBCC.AD |
Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update | 1 | View | |
| 2018-02-06 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2017-12-27 | PA.. |
Power of Attorney | 2 | View | |
| 2017-12-27 | SPEC |
Specification | 20 | View | |
| 2017-12-27 | CLM |
Claims | 5 | View | |
| 2017-12-27 | ABST |
Abstract | 1 | View | |
| 2017-12-27 | DRW |
Drawings-only black and white line drawings | 9 | View | |
| 2017-12-27 | TR.PROV |
Provisional Cover Sheet (SB16) | 4 | View | |
| 2017-12-27 | ADS |
Application Data Sheet | 9 | View | |
| 2017-12-27 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2017-12-27 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2017-12-27 | TRAN.LET |
Transmittal Letter | 1 | View |
Inventors
Shawming Ma
Sunnyvale, CA
Hua Chung
Saratoga, CA
Michael X. Yang
Palo Alto, CA
Dixit V. Desai
Pleasanton, CA
Ryan M. Pakulski
Discovery Bay, CA
Attorneys & Agents of Record
Prosecution
- Customer No.
- 177432
- Docket No.
- AGX-265-P
- Confirmation No.
- 8334
Child
PCT
Claims priority from a provisional application
→
PCT/US2018/065391
Filed 2018-12-13
· RO PROCESSING COMPLETED-PLACED IN STORAGE
Child
Claims priority from a provisional application
→
App. 17/225,547
Filed 2021-04-08
· Abandoned -- After Examiner's Answer or Board of Appeals Decision
Child
Claims priority from a provisional application
→
App. 16/218,931
Filed 2018-12-13
· Abandoned -- Failure to Respond to an Office Action
No recorded assignments were found for this patent.
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Quick Facts
- App. No.
- 62/610,573
- Filed
- 2017-12-27
External Links