Patent Application
Provisional
App. No. 62/567,295
· Confirmation No. 4182
Surface Treatment of Silicon and Carbon Containing Films by Remote Plasma with Organic Precursors
Inventor:
Michael X. Yang
Applicant:
Mattson Technology, Inc.
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2021-06-25 | EBCC.AD |
Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update | 1 | View | |
| 2017-10-19 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2017-10-03 | TR.PROV |
Provisional Cover Sheet (SB16) | 3 | View | |
| 2017-10-03 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2017-10-03 | PA.. |
Power of Attorney | 2 | View | |
| 2017-10-03 | SPEC |
Specification | 17 | View | |
| 2017-10-03 | CLM |
Claims | 5 | View | |
| 2017-10-03 | ABST |
Abstract | 1 | View | |
| 2017-10-03 | DRW |
Drawings-only black and white line drawings | 8 | View | |
| 2017-10-03 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2017-10-03 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2017-10-03 | ADS |
Application Data Sheet | 8 | View | |
| 2017-10-03 | TRAN.LET |
Transmittal Letter | 1 | View |
Inventors
Michael X. Yang
Palo Alto, CA
Attorneys & Agents of Record
Prosecution
- Customer No.
- 177432
- Docket No.
- AGX-259-P
- Confirmation No.
- 4182
Child
Claims priority from a provisional application
→
App. 15/958,601
· US 10,269,574
Filed 2018-04-20
· Patented Case
Child
PCT
Claims priority from a provisional application
→
PCT/US2018/051706
Filed 2018-09-19
· RO PROCESSING COMPLETED-PLACED IN STORAGE
Child
Claims priority from a provisional application
→
App. 15/958,560
· US 10,354,883
Filed 2018-04-20
· Patented Case
Child
PCT
Claims priority from a provisional application
→
PCT/US2018/051699
Filed 2018-09-19
· RO PROCESSING COMPLETED-PLACED IN STORAGE
Child
PCT
Claims priority from a provisional application
→
PCT/US2018/051714
Filed 2018-09-19
· RO PROCESSING COMPLETED-PLACED IN STORAGE
Child
Claims priority from a provisional application
→
App. 16/357,800
· US 10,910,228
Filed 2019-03-19
· Patented Case
Child
Claims priority from a provisional application
→
App. 16/444,146
· US 11,062,910
Filed 2019-06-18
· Patented Case
Child
Claims priority from a provisional application
→
App. 15/958,635
· US 10,804,109
Filed 2018-04-20
· Patented Case
No recorded assignments were found for this patent.
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Quick Facts
- App. No.
- 62/567,295
- Filed
- 2017-10-03
External Links