Patent Application
Provisional
App. No. 62/656,428
· Confirmation No. 1070
Low Thermal Budget Annealing
Inventor:
Paul J. Timans
Applicant:
Mattson Technology, Inc.
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2021-06-25 | EBCC.AD |
Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update | 1 | View | |
| 2018-04-17 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2018-04-12 | PA.. |
Power of Attorney | 2 | View | |
| 2018-04-12 | ADS |
Application Data Sheet | 8 | View | |
| 2018-04-12 | SPEC |
Specification | 27 | View | |
| 2018-04-12 | CLM |
Claims | 5 | View | |
| 2018-04-12 | ABST |
Abstract | 1 | View | |
| 2018-04-12 | DRW |
Drawings-only black and white line drawings | 10 | View | |
| 2018-04-12 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2018-04-12 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2018-04-12 | TR.PROV |
Provisional Cover Sheet (SB16) | 1 | View |
Inventors
Paul J. Timans
Cambridge, UNITED KINGDOM
Attorneys & Agents of Record
Prosecution
- Customer No.
- 177432
- Docket No.
- AGX-277-P
- Confirmation No.
- 1070
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2019-09-30
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Quick Facts
- App. No.
- 62/656,428
- Filed
- 2018-04-12
External Links