Patent Application
Provisional
App. No. 62/658,117
· Confirmation No. 6563
Processing Of Workpieces With Reactive Species Generated Using Alkyl Halide
Applicant:
Mattson Technology, Inc.
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2021-06-25 | EBCC.AD |
Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update | 1 | View | |
| 2018-04-19 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2018-04-16 | PA.. |
Power of Attorney | 2 | View | |
| 2018-04-16 | ADS |
Application Data Sheet | 9 | View | |
| 2018-04-16 | TR.PROV |
Provisional Cover Sheet (SB16) | 3 | View | |
| 2018-04-16 | SPEC |
Specification | 19 | View | |
| 2018-04-16 | CLM |
Claims | 2 | View | |
| 2018-04-16 | ABST |
Abstract | 1 | View | |
| 2018-04-16 | DRW |
Drawings-only black and white line drawings | 7 | View | |
| 2018-04-16 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2018-04-16 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2018-04-16 | TRAN.LET |
Transmittal Letter | 1 | View |
Inventors
Attorneys & Agents of Record
Prosecution
- Customer No.
- 177432
- Docket No.
- AGX-279-P2
- Confirmation No.
- 6563
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2019-09-30
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2018-06-15
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Quick Facts
- App. No.
- 62/658,117
- Filed
- 2018-04-16
External Links