Patent Assignment
Reel/Frame 046100/0734
Assignment of Assignor's Interest
Recorded: 2018-06-15
Pages: 3
Assignors
YANG, MICHAEL X.
Executed: 2018-06-14
CHUNG, HUA
Executed: 2018-06-14
LU, XINLIANG
Executed: 2018-06-14
Assignee
MATTSON TECHNOLOGY, INC.
47131 BAYSIDE PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Properties
(2)
Processing Of Workpieces With Reactive Species Generated Using Alkyl Halide
Application:
62/657,114 →
Processing Of Workpieces With Reactive Species Generated Using Alkyl Halide
Application:
62/658,117 →
Related Assignments
(4)
Other recorded transfers of the patents in this record — the chain of ownership.
Security Interest
Aug 27, 2018
From: MATTSON TECHNOLOGY, INC.
To: EAST WEST BANK
Reel/Frame 046956/0348 →
Security Interest
Sep 6, 2019
From: MATTSON TECHNOLOGY, INC.
To: EAST WEST BANK
Reel/Frame 050299/0372 →
Assignment of Assignor's Interest
Sep 30, 2019
From: MATTSON TECHNOLOGY, INC.
To: MATTSON TECHNOLOGY, INC.; BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY, CO., LTD
Reel/Frame 050582/0796 →
Release of Security Interest
Apr 15, 2021
From: EAST WEST BANK
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 055950/0452 →