IP Library Granted Patent US 11,193,178
Granted Patent B2
US 11,193,178 · App. 16/059,148 · Granted Dec 7, 2021

Thermal processing of closed shape workpieces

Inventors: Rolf Bremensdorfer (Bibertal, DE); Johannes Keppler (Dornstadt, DE); Michael Yang (Palo Alto, CA)
Assignees: Beijing E-Town Semiconductor Technology Co., Ltd.; Mattson Technology, Inc.
C21D9/08C21D1/09C21D11/00B23K26/035B23K26/0823C21D1/34
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Quick Facts
Patent No.
US 11,193,178
App. No.
16/059,148
Granted
Dec 7, 2021
Kind
B2
Abstract

Systems and methods for heat treating closed shape workpieces are provided. In one example implementation, a method can include imparting relative motion of the closed shape workpiece such that the perimeter surface of the closed shape workpiece is moved relative to the lamp heat source from a first position where a first portion of the closed shape workpiece is presented to the lamp heat source to a second position where a second portion of the closed shape workpiece is presented to the lamp heat source. The method can include emitting lamp heat onto the perimeter surface of the closed shape workpiece from the lamp heat source during imparting of relative motion of the closed shape workpiece. The method can include implementing a flux control procedure during emitting of lamp heat onto the perimeter surface of the closed shape workpiece.

Claims (19)

1. A method for heat treating a closed shape workpiece, the method comprising:

rotating the closed shape workpiece relative to a lamp heat source such that a perimeter surface of the closed shape workpiece is rotated from a first position in which a first portion of the closed shape workpiece is presented to the lamp heat source to a second position in which a second portion of the closed shape workpiece is presented to the lamp heat source, the closed shape workpiece being a hollow cylindrical workpiece;

emitting lamp heat onto the perimeter surface of the closed shape workpiece from the lamp heat source while rotating the closed shape workpiece;

implementing a heat flux control procedure during emitting of lamp heat onto the perimeter surface of the closed shape workpiece,

wherein implementing the heat flux control procedure comprises:

obtaining, by one or more control devices, data associated with a temperature measurement of the perimeter surface of the workpiece, the temperature measurement performed by a temperature sensor; and

implementing, by the one or more control devices, the heat flux control procedure based at least in part on the data associated with the temperature measurement;

wherein the temperature sensor comprises a thermal radiometer positioned such that a field of view associated with the temperature sensor is directed to a portion of the workpiece after it has rotated through light from the lamp heat source and such that the field of view does not include light from the lamp heat source.

2. The method of claim 1 , wherein the heat flux control procedure is implemented in a closed loop mode.

3. The method of claim 1 , wherein the lamp heat source comprises:

an arc lamp; and

an elliptical reflector operable to focus light emitted from the arc lamp onto the perimeter surface of the closed shape workpiece.

4. The method of claim 1 , wherein the cylindrical workpiece is a metal pipe.

5. The method of claim 1 , wherein a solid rod of thermally conductive material is located in the cylindrical workpiece.

6. The method of claim 1 wherein a fluid cooled pipe is located in the cylindrical workpiece.

7. The method of claim 1 , wherein the method comprises providing a cooling gas on an outer surface of the closed shape workpiece or an inner surface of the closed shape workpiece.

8. The method of claim 1 , further comprising:

moving the closed shape workpiece along an axial direction while continuing to rotate the closed shape workpiece when both the first portion of the perimeter surface and the second portion of the perimeter surface have been heated by the lamp heat emitted from the lamp heat source; and

subsequent to moving the workpiece along the axial direction, reimplementing the heat flux control procedure while emitting the lamp heat onto a third portion of the closed shape workpiece that is spaced apart from the first portion and the second portion along the axial direction.

Assignments (6)
RELEASE OF SECURITY INTEREST Recorded Apr 15, 2021
From: EAST WEST BANK
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 055950/0452 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 30, 2019
From: MATTSON TECHNOLOGY, INC.
To: MATTSON TECHNOLOGY, INC.; BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY, CO., LTD
Reel/Frame 050582/0796 →
SECURITY INTEREST Recorded Sep 6, 2019
From: MATTSON TECHNOLOGY, INC.
To: EAST WEST BANK
Reel/Frame 050299/0372 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 9, 2018
From: YANG, MICHAEL
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 046594/0485 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 9, 2018
From: BREMENSDORFER, ROLF; KEPPLER, JOHANNES
To: MATTSON THERMAL PRODUCTS GMBH
Reel/Frame 046594/0698 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 9, 2018
From: MATTSON THERMAL PRODUCTS GMBH
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 046594/0778 →