Strip process for high aspect ratio structure
View Patent ↗Processes for removing a mask layer (e.g., doped amorphous carbon mask layer) from a substrate with high aspect ratio structures are provided. In one example implementation, a process can include depositing a polymer layer on at least a portion of a top end of a high aspect ratio structure on a substrate. The process can further include removing at least a portion of the polymer layer and the doped amorphous carbon film form the substrate using a plasma strip process. In example embodiments, depositing a polymer layer can include plugging one or more high aspect ratio structures with the polymer layer. In example embodiments, depositing a polymer layer can include forming a polymer layer on a sidewall of one or more high aspect ratio structures.
1. A process for removing at least a portion of a mask layer from a substrate, the substrate having a patterned area with one or more high aspect ratio structures and an unpatterned area without high aspect ratio structures, the process comprising:
placing the substrate in a plasma processing apparatus;
performing a polymer deposition process in the plasma processing apparatus to deposit a polymer layer on at least a portion of the mask layer on the patterned area of the substrate and the unpatterned area of the substrate;
performing a plasma strip process in the plasma processing apparatus to remove at least a portion of the polymer layer and at least the portion of the mask layer from the substrate,
wherein the mask layer is thicker on the unpatterned layer than on the patterned layer.
2. The process of claim 1 , wherein the polymer deposition process clogs at least one of the one or more high aspect ratio structures with the polymer layer.
3. The process of claim 1 , wherein the polymer deposition process at least partially forms the polymer layer on a sidewall of at least one of the one or more high aspect ratio structures.
4. The process of claim 1 , wherein the polymer layer is formed using one or more of CHF 3 , H 2 , N 2 , Ar or their combination.
5. The process of claim 1 , wherein the polymer layer is formed using a gas C x H t F z combined with any H 2 or any C x1 H y1 , where x, y, z, x1, and y1 are integers.
6. The process of claim 1 , wherein the plasma processing apparatus comprises a strip chamber.