Patent Assignment
Reel/Frame 048217/0675
Assignment of Assignor's Interest
Recorded: 2019-02-01
Pages: 3
Assignors
SAVAS, STEPHEN EDWARD
Executed: 2019-01-29
CHEN, CHEN-AN
Executed: 2019-01-29
MA, SHAWMING
Executed: 2019-01-29
Assignee
MATTSON TECHNOLOGY, INC.
47131 BAYSIDE PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Electrostatic Shield for Inductive Plasma Sources
Application:
16/245,973 →
Publication:
US 2020/0227239
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Sep 30, 2019
From: MATTSON TECHNOLOGY, INC.
To: MATTSON TECHNOLOGY, INC.; BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY, CO., LTD
Reel/Frame 050582/0796 →
Security Interest
Oct 19, 2020
From: MATTSON TECHNOLOGY, INC.
To: EAST WEST BANK
Reel/Frame 054100/0167 →
Release of Security Interest
Apr 15, 2021
From: EAST WEST BANK
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 055950/0452 →