Patent Assignment
Reel/Frame 042922/0743
Assignment of Assignor's Interest
Recorded: 2017-07-06
Pages: 6
Assignors
YAMAZAKI, SHUNPEI
Executed: 2017-07-03
NAKASHIMA, MOTOKI
Executed: 2017-06-26
BABA, HARUYUKI
Executed: 2017-06-26
Assignee
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
398, HASE, ATSUGI-SHI, KANAGAWA-KEN, 243-0036, JAPAN
Covered Property
(1)
Sputtering Target and Method for Manufacturing the Same