Patent Assignment
Reel/Frame 042923/0441
Assignment of Assignor's Interest
Recorded: 2017-07-06
Pages: 3
Assignor
DEVILLIERS, ANTON
Executed: 2017-03-17
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
System and Method for Temperature Control in Plasma Processing System