Patent Assignment
Reel/Frame 043002/0084
Assignment of Assignor's Interest
Recorded: 2017-07-13
Pages: 4
Assignor
PARK, JONGCHUL
Executed: 2017-05-22
Assignee
SAMSUNG ELECTRONICS CO., LTD.
129, SAMSUNG-RO, YEONGTONG-GU, SUWON-SI, GYEONGGI-DO, 16677, KOREA, REPUBLIC OF
Covered Property
(1)
Ion Beam Apparatus Including Slit Structure for Extracting Ion Beam, Etching Method Using the Same, and Method for Manufacturing Magnetic Memory Device Using the Ion Beam Apparatus