Patent Assignment
Reel/Frame 043005/0014
Assignment of Assignor's Interest
Recorded: 2017-07-14
Pages: 3
Assignor
YAMAZAKI, SHUNPEI
Executed: 2017-06-21
Assignee
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
398, HASE, ATSUGI-SHI, KANAGAWA-KEN, 243-0036, JAPAN
Covered Property
(1)
Sputtering Target, Oxide Semiconductor, Oxynitride Semiconductor, and Transistor