Patent Assignment
Reel/Frame 043118/0348
Assignment of Assignor's Interest
Recorded: 2017-07-27
Pages: 6
Assignors
MIYAHARA, TAKAHIRO
Executed: 2017-07-13
SUZUKI, DAISUKE
Executed: 2017-07-14
MURAKAMI, HIROKI
Executed: 2017-07-13
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method and Apparatus for Forming Nitride Film