Patent Assignment
Reel/Frame 043207/0863
Assignment of Assignor's Interest
Recorded: 2017-08-04
Pages: 5
Assignors
KAMENITSA, DENNIS ELLIOTT
Executed: 2017-08-01
RZESZUT, RICHARD J.
Executed: 2017-07-25
SILVA, FERNANDO M.
Executed: 2017-07-27
BERINGER, JASON R.
Executed: 2017-07-19
WU, XIANGYANG
Executed: 2017-07-20
Assignee
AXCELIS TECHNOLOGIES, INC.
108 CHERRY HILL DRIVE, BEVERLY, MASSACHUSETTS, 01915
Covered Property
(1)
Implantation Using Solid Aluminum Iodide (ALI3) for Producing Atomic Aluminum Ions and in Situ Cleaning of Aluminum Iodide and Associated By-Products
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.
Security Interest
Jul 31, 2020
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK, AS ADMINISTRATIVE AGENT
Reel/Frame 053375/0055 →
Release of Security Interest
Apr 7, 2023
From: SILICON VALLEY BANK A DIVISION OF FIRST-CITIZENS BANK & TRUST COMPANY
To: AXCELIS TECHNOLOGIES, INC.
Reel/Frame 063270/0277 →