Patent Assignment
Reel/Frame 043268/0900
Assignment of Assignor's Interest
Recorded: 2017-08-11
Pages: 22
Assignors
GILCHRIST, GLEN F. R.
Executed: 2017-07-26
PERVAIZ, RAEES
Executed: 2017-07-26
STARKS, KENNETH
Executed: 2017-07-26
LIANG, SHURONG
Executed: 2017-07-20
ROCKWELL, TYLER
Executed: 2017-07-26
Assignee
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
35 DORY ROAD, GLOUCESTER, MASSACHUSETTS, 01930
Covered Property
(1)
Apparatus and Techniques for Anisotropic Substrate Etching