Patent Assignment
Reel/Frame 043402/0020
Assignment of Assignor's Interest
Recorded: 2017-08-25
Pages: 4
Assignors
NAGAI, HIROYUKI
Executed: 2017-07-24
CHANG, PENG
Executed: 2017-07-27
MATSUMOTO, KENJI
Executed: 2017-07-27
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Cu WIRING FORMING METHOD AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD