Patent Assignment
Reel/Frame 043440/0884
Assignment of Assignor's Interest
Recorded: 2017-08-29
Pages: 5
Assignors
BENJAMIN, NEIL MARTIN PAUL
Executed: 2017-08-28
POVOLNY, HENRY
Executed: 2017-08-24
RICCI, ANTHONY J.
Executed: 2017-08-25
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Properties
(2)
Electrostatic Chuck Including Clamp Electrode Assembly Forming Portion of Faraday Cage for RF Delivery and Associated Methods
Electrostatic Chuck Including Clamp Electrode Assembly Forming Portion of Faraday Cage for RF Delivery and Associated Methods
Application:
62/419,284 →