IP Library › Patent Application 62419284
Patent Application Provisional
App. No. 62/419,284 · Confirmation No. 1043

Electrostatic Chuck Including Clamp Electrode Assembly Forming Portion of Faraday Cage for RF Delivery and Associated Methods

Provisional Application Expired
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 Code Description Pages PDF
2016-11-17 APP.FILE.REC Filing Receipt 3 View
2016-11-08 TR.PROV Provisional Cover Sheet (SB16) 3 View
2016-11-08 SPEC Specification 32 View
2016-11-08 CLM Claims 9 View
2016-11-08 ABST Abstract 1 View
2016-11-08 DRW Drawings-only black and white line drawings 13 View
2016-11-08 WFEE Fee Worksheet (SB06) 2 View
2016-11-08 N417 Electronic Filing System Acknowledgment Receipt 3 View
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Quick Facts
App. No.
62/419,284
Filed
2016-11-08