Patent Assignment
Reel/Frame 043534/0254
Assignment of Assignor's Interest
Recorded: 2017-09-08
Pages: 8
Assignors
SOTOKU, KOTA
Executed: 2017-08-28
HAYASHI, TOYOHIDE
Executed: 2017-08-28
HATANO, AKITO
Executed: 2017-08-29
GOHARA, TAKAYUKI
Executed: 2017-08-28
TAKAHASHI, HIROAKI
Executed: 2017-08-28
Assignee
SCREEN HOLDINGS CO., LTD.
TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Substrate Processing Method and Substrate Processing Apparatus