Substrate processing method and substrate processing apparatus
A substrate processing apparatus including a plurality of baking chambers stacked in a prescribed direction, each baking chamber carrying out heat treatment of a substrate in its interior, a processing unit having a liquid processing chamber separate from the baking chambers and carrying out liquid processing of the substrate using the processing liquid, and an enclosing isolating space that encloses the sides of the plurality of baking chambers and isolates the baking chambers from the surrounding area.
1. A substrate processing apparatus comprising:
a plurality of baking chambers stacked in a prescribed direction, and in each of the baking chambers, a heater arranged so as to heat a substrate therein, and a box-shaped partition wall that surrounds the heater and provided with a carry-in/carry-out port through which the substrate passes to carry-in or carry-out;
a processing unit having a liquid processing chamber separate from the baking chambers and carrying out liquid processing of the substrate using a processing liquid; and
an enclosing isolating space that encloses sides of the partition walls of the plurality of baking chambers and isolates the baking chambers from a surrounding area,
wherein a plurality hollow boxes are provided such that respective internal spaces of the plurality of hollow boxes form the enclosing isolating space that surrounds the sides of the partition walls of the baking chambers entirely when viewed in plan view except a region opposing to the carry-in/carry-out port.
2. The substrate processing apparatus according to claim 1 , wherein the baking chambers each include a chamber that supplies processing gas to the substrate while heating the substrate.
3. The substrate processing apparatus according to claim 1 , further comprising:
a container holder that holds a container for housing of the substrate, wherein
the liquid processing chamber being disposed on a side opposite from the container holder with respect to the baking chambers.
4. The substrate processing apparatus according to claim 3 , further comprising:
a transfer chamber for transfer of the substrate being held by the container holder, to the baking chambers and the liquid processing chamber, wherein
the enclosing isolating space including a first isolating space provided between the baking chambers and the transfer chamber.
5. The substrate processing apparatus according to claim 3 , wherein the enclosing isolating space includes a second isolating space provided between the baking chambers and an outer wall of the substrate processing apparatus.
6. The substrate processing apparatus according to claim 3 , wherein the enclosing isolating space includes a third isolating space provided between the baking chambers and the liquid processing chamber.
7. The substrate processing apparatus according to claim 1 , wherein
each of the baking chambers includes in its interior a chamber that supplies processing gas to the substrate while heating the substrate,
the enclosing isolating space includes:
a piping housing space that houses an exhaust piping through which exhaust circulates from the baking chambers and/or a processing gas supply piping, that supplies processing gas to the baking chambers, and
an electrical device housing space that houses electrical devices associated with the baking chambers, and
the electrical device housing space is disposed on a side opposite from the piping housing space with respect to the baking chambers.
8. The substrate processing apparatus according to claim 1 , wherein, inside each of the baking chambers, there is housed an inner chamber that supplies processing gas to the substrate while heating the substrate therein.