Patent Assignment
Reel/Frame 043547/0710
Assignment of Assignor's Interest
Recorded: 2017-09-11
Pages: 9
Assignors
HASHIMOTO, YOSHITOMO
Executed: 2017-08-04
MATSUOKA, TATSURU
Executed: 2017-08-04
NAGATO, MASAYA
Executed: 2017-08-04
HORIIKE, RYOTA
Executed: 2017-08-04
KOGURA, SHINTARO
Executed: 2017-08-04
Assignee
HITACHI KOKUSAI ELECTRIC INC.
15-12, NISHI-SHIMBASHI 2-CHOME, MINATO-KU, TOKYO, 105-8039, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus Comprising Exhaust Port and Multiple Nozzles, and Recording Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.