Patent Assignment
Reel/Frame 043548/0928
Assignment of Assignor's Interest
Recorded: 2017-09-11
Pages: 5
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method for Etching Magnetic Layer Including Isopropyl Alcohol and Carbon Dioxide