Patent Assignment
Reel/Frame 043684/0195
Assignment of Assignor's Interest
Recorded: 2017-09-25
Pages: 3
Assignors
MORIYAMA, YOSHIKAZU
Executed: 2017-09-15
IKEYA, NAOHISA
Executed: 2017-09-15
SUZUKI, KUNIHIKO
Executed: 2017-09-15
Assignee
NUFLARE TECHNOLOGY, INC.
8-1, SHINSUGITA-CHO, ISOGO-KU, YOKOHAMA-SHI, KANAGAWA, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Transfer Method, and Susceptor