Patent Assignment
Reel/Frame 043684/0465
Assignment of Assignor's Interest
Recorded: 2017-09-25
Pages: 3
Assignee
HOYA CORPORATION
6-10-1 NISHI-SHINJUKU, SHINJUKU-KU, TOKYO, 160-8347, JAPAN
Covered Property
(1)
Mask Blank, Phase Shift Mask, Method for Manufacturing Phase Shift Mask, and Method for Manufacturing Semiconductor Device