Patent Assignment
Reel/Frame 043881/0967
Assignment of Assignor's Interest
Recorded: 2017-10-17
Pages: 6
Assignee
KANTO DENKA KOGYO CO., LTD.
2-105, KANDA-AWAJICHO, CHIYODA-KU, TOKYO, 101-0063, JAPAN
Covered Property
(1)
Etching Gas Composition for Silicon Compound, and Etching Method