Patent Assignment
Reel/Frame 043883/0572
Change of Name
Recorded: 2017-09-18
Pages: 3
Assignor
BEIJING NMC CO., LTD.
Executed: 2017-01-03
Assignee
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
NO. 8 WENCHANG AVENUE BEIJING ECONOMIC-TECHNOLOGICAL DEVELOPMENT AREA, BEIJING, CHINA
Covered Properties
(5)
Inductively Coupled Coil and Inductively Coupled Plasma Device Using the Same
Plasma Processing Apparatus
Pre-Cleaning Chamber and a Semiconductor Processing Apparatus Containing the Same
Application:
15/012,941 →
Publication:
US 2016/0148789
Apparatus for Plasma Treatment and Method of Operating the Apparatus
Inductively Coupled Coil and Inductively Coupled Plasma Device Using the Same
Related Assignments
(4)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignor's Interest
Feb 27, 2009
From: SONG, QIAOLI; NAN, JIANHUI
To: BEIJING NMC CO., LTD.
Reel/Frame 022333/0344 →
Assignment of Assignor's Interest
May 6, 2013
From: CHEN, PENG; ZHAO, MENGXIN; WEI, GANG; ZHANG, LIANG
To: BEIJING NMC CO., LTD.
Reel/Frame 030353/0877 →
Assignment of Assignor's Interest
Feb 2, 2016
From: CHEN, PENG; LV, YOU; DING, PEIJUN; YANG, JINGSHAN
To: BEIJING NMC CO., LTD
Reel/Frame 037680/0103 →
Assignment of Assignor's Interest
May 24, 2016
From: ZHAO, JINRONG; LIU, SHAOHUA; WEI, GANG; PENG, YULIN
To: BEIJING NMC CO., LTD.
Reel/Frame 038703/0954 →