Patent Assignment
Reel/Frame 043995/0154
Assignment of Assignor's Interest
Recorded: 2017-10-31
Pages: 6
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method and Apparatus for Multi-Film Deposition and Etching in a Batch Processing System