Method and apparatus for multi-film deposition and etching in a batch processing system

1. A method for processing substrates in a batch processing system, the method comprising:

a) arranging the substrates on a plurality of substrate supports in a process chamber, wherein the process chamber contains processing spaces defined around an axis of rotation in the process chamber;

b) rotating the plurality of substrate supports about the axis of rotation;

c) depositing a first film on a patterned film on each of the substrates by atomic layer deposition;

d) etching a portion of the first film on each of the substrates, wherein etching a portion of the first film includes removing at least one horizontal portion of the first film while substantially leaving vertical portions of the first film;

e) depositing a second film on the first film on each of the substrates by atomic layer deposition, wherein the second film contains a different material than the first film;

f) etching a portion of the second film on each of the substrates, wherein etching a portion of the second film includes removing at least one horizontal portion of the second film while substantially leaving vertical portions of the second film; wherein depositing the first film includes

injecting a first deposition precursor into a first processing space defined by a first included angle about the axis of rotation;

exposing a top surface of each of the substrates to the first deposition precursor in the first processing space during each full rotation to bond molecules of the first deposition precursor;

exposing each of the substrates to an inert atmosphere within a second processing space defined by a second included angle about the axis of rotation during each full rotation;

injecting a second deposition precursor into a third processing space defined by a third included angle about the axis of rotation and separated from the first processing space by the second processing space;

exposing the top surface of each of the substrates to the second deposition precursor during each full rotation;

exposing each of the substrates to an inert atmosphere within a fourth processing space defined by a fourth included angle about the axis of rotation and separated from the second processing space by the third processing space; and

re-exposing the top surface of each of the substrates to the first and second deposition precursors by repeatedly rotating the substrates through the first, second, third, and fourth processing spaces for incrementally depositing the first film on each of the substrates.

2. The method of claim 1 , further comprising

repeating c) and d), e) and f), or c), d), e) and f), at least once.

3. The method of claim 1 , wherein the first film is selected from the group consisting of silicon dioxide, silicon nitride, silicon oxynitride, other metal or non-metal oxides, nitrides, or silicides, and a high-k material.

4. The method of claim 3 , wherein the high-k material is selected from the group consisting of titanium oxide, titanium nitride, aluminum oxide, aluminum nitride, hafnium oxide, zirconium oxide, and combinations thereof.

5. The method of claim 1 , wherein etching the portion of the first film includes

injecting a first etching gas into one or more of the processing spaces; and

exposing the first film to the first etching gas to remove the portion of the first film.

6. The method of claim 5 , wherein the first etching gas includes a plasma-excited etching gas.

7. The method of claim 1 , wherein, the etching the portion of the first film includes

atomic layer etching, where different etching gases are injected into one or more of the processing spaces.

8. The method of claim 1 , wherein the first deposition precursor is selected from the group consisting of a silicon precursor, a germanium precursor, a metal-containing precursor, and a combination thereof.

9. The method of claim 1 , wherein the second deposition precursor includes an oxidation source, a nitridation source, or both an oxidation source and a nitridation source.

10. The method of claim 1 , wherein the second deposition precursor includes a silicide source or a reactant capable of removing or replacing surface ligands of the first deposition precursor to continue the atomic layer deposition.

11. The method of claim 1 , wherein the second film is selected from the group consisting of silicon dioxide, silicon nitride, silicon oxynitride, other metal or non-metal oxides, nitrides, or silicides, and a high-k material.

12. The method of claim 11 , wherein the high-k material is selected from the group consisting of titanium oxide, titanium nitride, aluminum oxide, aluminum nitride, hafnium oxide, zirconium oxide, and combinations thereof.

13. The method of claim 1 , wherein etching the portion of the second film includes

injecting a second etching gas into one or more of the processing spaces; and

exposing the second film to the second etching gas to remove the portion of the second film.

14. The method of claim 13 , wherein the second etching gas includes a plasma-excited etching gas.

15. The method of claim 1 , wherein etching the portion of the second film includes

atomic layer etching, where different etching gases are injected into one or more of the processing spaces.

16. A method for processing substrates in a batch processing system, the method comprising:

a) arranging the substrates on a plurality of substrate supports in a process chamber, wherein the process chamber contains processing spaces defined around an axis of rotation in the process chamber;

b) rotating the plurality of substrate supports about the axis of rotation;

c) depositing a first film on a patterned film on each of the substrates by atomic layer deposition;

d) etching a portion of the first film on each of the substrates, wherein etching a portion of the first film includes removing at least one horizontal portion of the first film while substantially leaving vertical portions of the first film;

e) depositing a second film on the first film on each of the substrates by atomic layer deposition, wherein the second film contains a different material than the first film; and

f) etching a portion of the second film on each of the substrates, wherein etching a portion of the second film includes removing at least one horizontal portion of the second film while substantially leaving vertical portions of the second film, wherein depositing the second film includes

injecting a third deposition precursor into a first processing space defined by a first included angle about the axis of rotation;

exposing a top surface of each of the substrates to a third deposition precursor in the first processing space during each full rotation to bond molecules of the third deposition precursor;

exposing each of the substrates to an inert atmosphere within a second processing space defined by a second included angle about the axis of rotation during each full rotation;

injecting a fourth deposition precursor into a third processing space defined by a third included angle about the axis of rotation and separated from the first processing space by the second processing space;

exposing the top surface of each of the substrates to the fourth deposition precursor during each full rotation;

exposing each of the substrates to an inert atmosphere within a fourth processing space defined by a fourth included angle about the axis of rotation and separated from the second processing space by the third processing space; and

re-exposing the top surface of each of the substrates to the third and fourth deposition precursors by repeatedly rotating the substrates through the first, second, third, and fourth processing spaces for incrementally depositing the second film on each of the substrates.

17. The method of claim 16 , wherein the third deposition precursor is selected from the group consisting of a silicon precursor, a germanium precursor, a metal-containing precursor, and a combination thereof.

18. The method of claim 16 , wherein the fourth deposition precursor includes an oxidation source, a nitridation source, or both an oxidation source and a nitridation source.

19. The method of claim 16 , wherein the fourth deposition precursor includes a silicide source or a reactant capable of removing or replacing surface ligands of the third deposition precursor to continue the atomic layer deposition.